莊晴光Tzuang, Ching-Kuang C.臺灣大學:電信工程學研究所楊星瀚Yang, Sin-HanSin-HanYang2010-07-012018-07-052010-07-012018-07-052009U0001-1208200914572000http://ntur.lib.ntu.edu.tw//handle/246246/188277使用0.18微米CMOS製程設計兆赫波感測系統。因為製程中最大增益頻率的不足，我們使用測輻射熱儀的方式設計這個系統。 設計了一個溫度感測電路在CMOS製程，替換了需要特殊材料的測輻射熱儀。在這感測系統中，天線接收了兆赫波的能量，經由匹配的負載吸收轉換成熱能。隨之升高的溫度再經由溫度感測電路的偵測轉換成電壓的輸出。因此，我們可以偵測兆赫波的信號。 在這論文中，展現了10.6微米波長的天線設計。示範了使用有線元素法軟體進行熱的分析。設置了一個量測的環境。後我們得到了兩張空間響應分布圖，分別是使用垂直極化波和水平極化波入射。可從中看出天線和不同結構金屬對兆赫波能量的吸收程度。We design a THz sensing system using 0.18 micron CMOS process. Here we use the bolometer approach because the maximum gain frequency of 0.18 micron CMOS is not enough for micron wavelength detector. A thermal sensor is designed in CMOS process to replace the bolometer in other process. THz signal is received by an antenna and the power of THz beam is translated to heat by a matched load. The thermal sensor senses the change of temperature and output a respond voltage level. Therefore, the THz signal is obtained. In this report, the design of antenna in 10.6 micron wavelength is shown and the thermal analysis using FEM software is demonstrated. The measurement environment is setup. Finally, two pictures of spatial response in horizontal polarization and vertical polarization are got. The absorbing ability of THz wave in antennas and different metal structure can be seen.誌謝 i文摘要 iiBSTRACT iiiONTENTS ivIST OF FIGURES viIST OF TABLES ixhapter 1 Introduction 1hapter 2 Terahertz Sensing System 6.1 Basic Bolometer Theory 6.2 Block Body Radiation 9.2.1 Heat Radiation 9.2.2 Stefan-Boltzmann Law 9.3 Proposed Terahertz Sensor in EM-Thermal Approach 10hapter 3 Thermal Sensing Circuits 12.1 PTAT (Proportional To Absolute Temperature) Circuit 12.2 Thermopiles 17.3 Differential Thermal Sensor 19hapter 4 The Heating of Matched Load 24.1 Antennas Designed in CMOS 25.2 Static State Thermal Simulation 29.3 Transient Thermal Simulation 34hapter 5 Test and Measurement 38.1 First Time Measurement 38.2 Second Time Measurement 42hapter 6 Conclusion 50EFERENCE 516460848 bytesapplication/pdfen-US互補式金氧半兆赫波溫度感測空間響應分布紅外線CMOSterahertzthermal sensorspatial responseinfraredthesishttp://ntur.lib.ntu.edu.tw/bitstream/246246/188277/1/ntu-98-R96942003-1.pdf