Local stress determination in Shallow Trench Insulator structures with one-side and two-sides Pad-SiN layer by polarized micro-Raman spectroscopy extraction and mechanical modelization

Liao, M.H.M.H.LiaoChang, L.C.L.C.Chang2019-03-112019-03-112011https://scholars.lib.ntu.edu.tw/handle/123456789/404484Local stress determination in Shallow Trench Insulator structures with one-side and two-sides Pad-SiN layer by polarized micro-Raman spectroscopy extraction and mechanical modelizationconference paper10.1109/ISDRS.2011.61353492-s2.0-84857209006