The affinity of Si-N and Si-C bonding in amorphous silicon carbon nitride (a-SiCN) thin film

Chen C.W.Huang C.C.Lin Y.Y.Chen L.C.K.H. Chen2019-11-272019-11-27200509259635https://www.scopus.com/inward/record.uri?eid=2-s2.0-18444418316&doi=10.1016%2fj.diamond.2004.10.045&partnerID=40&md5=81ec57d2f27919815025be62387f5cf9https://scholars.lib.ntu.edu.tw/handle/123456789/432879The affinity of Si-N and Si-C bonding in amorphous silicon carbon nitride (a-SiCN) thin filmconference paper10.1016/j.diamond.2004.10.0452-s2.0-18444418316