Active vibration isolation of a large stroke scanning probe microscope by using discrete sliding mode control

Yen, J.-Y.J.-Y.YenLan, K.-J.K.-J.LanKramar, J.A.J.A.KramarJIA-YUSH YEN2018-09-102018-09-102005http://www.scopus.com/inward/record.url?eid=2-s2.0-21744458635&partnerID=MN8TOARShttp://scholars.lib.ntu.edu.tw/handle/123456789/314159application/pdfapplication/pdfActive vibration isolation of a large stroke scanning probe microscope by using discrete sliding mode controljournal article10.1016/j.sna.2005.02.0352-s2.0-21744458635WOS:000229627300033