盧信嘉Lu, Hsin-Chia臺灣大學:電子工程學研究所蕭植文Hsiao, Chih-WenChih-WenHsiao2010-07-142018-07-102010-07-142018-07-102008U0001-2108200821274000http://ntur.lib.ntu.edu.tw//handle/246246/189078本論文根據圖型式接地屏蔽的互聯傳輸線的優點,我們提出一個新的延伸性傳輸線架構-挖槽的半同軸纜線,並使用環苯丁烷和硫亞氨單體聚合物作為電介質材料。並同時與不同開槽寬度的半同軸纜線以及不同的複雜幾何圖形式接地屏蔽的挖槽半同軸纜線作比較,探討其單端時的損耗優劣及其他特性。模擬及量測結果的顯示,在維持與旁邊的地面等距以及維持相同阻抗的情況下,單端與差動對的開槽線均具有較低的損耗。Based on low loss patterned ground shield interconnect transmission lines, we proposes a new structure of transmission line- slotted semi-coaxial line by using BCB and PI as the dielectric materials. We compared the attenuation constant and other properties of slotted semi-coaxial line and some different types of patterned ground shield slotted semi-coaxial line in single-ended with different slot widths. The proposed slotted semi-coaxial lines show lower attenuation constant by simulation under same spacing to side ground and same characteristic impedance.Chapter 1 Introduction 1.1 Motivation 1.2 Integrated Passive Device (IPD) 1.3 Summary 5hapter 2 Literature survey on low loss transmission lines 7.1 Semi-circular line series 7.1.1 Semi-circular GCPW and V-shaped GCPW [1] 7.1.2 Semi-coaxial lines [2] 9.1.3 Slotted differential semi-coaxial line on CMOS processing [3] 11.1.4 Slotted semi-coaxial lines on BCB processing [4] 13.2 A grounded coplanar waveguide with air cavity on a silicon substrate [5] 15.3 3-D coplanar waveguide transmission line [6] 17.4 Patterned ground shield interconnect transmission lines [7] 19.5 Comparison on previous low loss transmission lines 21hapter 3 Foundation of Transmission Line 25.1 RLGC Model of Transmission Line [8] 25.2 Converting scattering matrix to RLGC parameters [8] 28hapter 4 Simulation Results of Transmission Line 33.1 Simulation results of single-ended transmission lines 33.1.1 Comparison of BCB and PI dielectric materials 33.1.2 Structure of single-ended transmission line on BCB 35.1.3 Simulation results of single-ended lines on BCB 37.1.4 Simulation results of single-ended lines on PI 43.1.5 Performance of Comparison 47.2 Effect of slot width 48.2.1 Dimension of the slot lines on BCB substrate 48.2.2 Simulation results of the slotted lines on BCB 49.2.3 Simulation results of the slot lines on PI 54.2.4 Performance of Comparison 58.3 Simulation results of the patterned ground lines 59.3.1 Dimension of the patterned ground lines 59.3.2 Simulation results of the patterned ground lines on BCB 61.3.3 Simulation results of the patterned ground lines on PI 66.3.4 Performance of Comparison 71.4 Effect of metal ground thickness for BCB and PI 71.5 Summery 76.6 Suggested design flow for type A transmission line 77hapter 5 Conclusion 79eference 812282925 bytesapplication/pdfen-US廣域連結內部連接傳輸線積體被動元件圖型式接地屏蔽Global interconnectinterconnect transmission linesintegrated passive devicepatterned ground shieldingIPD製程上之低損耗開槽傳輸線Low-loss slotted transmission line on IPD processthesishttp://ntur.lib.ntu.edu.tw/bitstream/246246/189078/1/ntu-97-R95943095-1.pdf