Polymerized hexamethyldisilazane coated on equiatomic TiNi shape memory alloy using DC-pulsed plasma assisted chemical vapor deposition

Chen, C.-H.C.-H.ChenYang, M.-R.M.-R.YangWu, S.-K.S.-K.WuChen, Chien-HuiChien-HuiChenYang, Mu-RongMu-RongYangWu, Shyi-KaanShyi-KaanWuChen, C.H.C.H.ChenWu, S.K.S.K.WuYang, M-RM-RYangSHYI-KAAN WU2018-09-102018-09-102008http://www.scopus.com/inward/record.url?eid=2-s2.0-44249112620&partnerID=MN8TOARShttp://scholars.lib.ntu.edu.tw/handle/123456789/338419application/pdfapplication/pdfPolymerized hexamethyldisilazane coated on equiatomic TiNi shape memory alloy using DC-pulsed plasma assisted chemical vapor depositionjournal article10.1016/j.surfcoat.2007.09.052