Adaptation-Enhanced Model-Based Control with Charge Feedback for Piezo-Actuated Stage

Yeh, Y.-L.Y.-L.YehYen, J.-Y.J.-Y.YenJIA-YUSH YEN2021-02-042021-02-042020Yeh, Y.-L.;Yen, J.-Y.;Wu, C.-J.https://www.scopus.com/inward/record.url?eid=2-s2.0-85054811593&partnerID=40&md5=e7acbc77a6f9095a7b1b8d72a7ec2c04https://scholars.lib.ntu.edu.tw/handle/123456789/547468Adaptation-Enhanced Model-Based Control with Charge Feedback for Piezo-Actuated Stagejournal article10.1002/asjc.19332-s2.0-85054811593WOS:000509509900009