Optical Characteristics and Irradiation Stability of PECVD-Grown Sinx Films Prepared for DUV Attenuated Phase Shifting Masks

L. A. Wang,L. A. WangH. L. Chen,H. L. ChenC. W. Hsu,C. W. HsuL. S. Yeh,L. S. YehLON A. WANG2018-09-102018-09-101998-01http://scholars.lib.ntu.edu.tw/handle/123456789/342850Optical Characteristics and Irradiation Stability of PECVD-Grown Sinx Films Prepared for DUV Attenuated Phase Shifting Masksconference paper