Equipment condition diagnosis and fault fingerprint extraction in semiconductor manufacturing

Rostami, H.H.RostamiBlue, J.J.BlueYugma, C.C.YugmaJAKEY BLUE2020-03-022020-03-022017https://scholars.lib.ntu.edu.tw/handle/123456789/467304Equipment condition diagnosis and fault fingerprint extraction in semiconductor manufacturingconference paper10.1109/ICMLA.2016.902-s2.0-85015454213https://www.scopus.com/inward/record.uri?eid=2-s2.0-85015454213&doi=10.1109%2fICMLA.2016.90&partnerID=40&md5=0400f2bd9df3810ec093a26208f4ead5