Hsu, S. M.S. M.Hsu林浩雄Lin, Hao-HsiungHao-HsiungLin2009-02-042018-07-062009-02-042018-07-061991http://ntur.lib.ntu.edu.tw//handle/246246/121551en-USReactive Ion Etching of GaAs Using CCl2F2 Plasmaconference paper