Micro electrode array - A new method for the design of electrostatic micro actuators and capacitive micro sensors

Chang, C.L.C.L.ChangChang, P.Z.P.Z.ChangHuang, R.S.R.S.HuangChang, C.P.C.P.ChangCheng, M.C.M.C.ChengPEI-ZEN CHANG2020-04-282020-04-281997https://scholars.lib.ntu.edu.tw/handle/123456789/486870[SDGs]SDG7Micro electrode array - A new method for the design of electrostatic micro actuators and capacitive micro sensorsconference paper10.1117/12.2935422-s2.0-1542571139https://www.scopus.com/inward/record.uri?eid=2-s2.0-1542571139&doi=10.1117%2f12.293542&partnerID=40&md5=a48bab1e5953c8746db42341dd73930c