Infrared Reflectance Study of 3C-SiC Grown on Si by Chemical Vapor Deposition

Feng, Zhe ChuanZhe ChuanFengHuang, C.W.C.W.HuangChang, W.Y.W.Y.ChangZhao, JieJieZhaoTin, Chin CheChin CheTinLu, Wei JieWei JieLuCollins, W.E.W.E.Collins2011-08-012018-07-052011-08-012018-07-052006http://ntur.lib.ntu.edu.tw//handle/246246/236351en-USInfrared Reflectance Study of 3C-SiC Grown on Si by Chemical Vapor Depositionjournal articlehttp://ntur.lib.ntu.edu.tw/bitstream/246246/236351/-1/08.pdf