Stress control for overlay registration in a-Si:H TFTs on flexible organic-polymer-foil substrates

Cheng, I.-C.I.-C.ChengKattamis, A.A.KattamisLong, K.K.LongSturm, J.C.J.C.SturmWagner, S.S.WagnerI-CHUN CHENG2018-09-102018-09-102005http://www.scopus.com/inward/record.url?eid=2-s2.0-33644647982&partnerID=MN8TOARShttp://scholars.lib.ntu.edu.tw/handle/123456789/316351Stress control for overlay registration in a-Si:H TFTs on flexible organic-polymer-foil substratesjournal article10.1889/1.2001213