National Taiwan University Dept PhysFan, K.C.K.C.FanFei, Y.T.Y.T.FeiYu, X.F.X.F.YuChen, Y.J.Y.J.ChenWang, W.L.W.L.WangChen, F.F.ChenLiu, Y.S.Y.S.Liu2006-11-142018-06-282006-11-142018-06-282006http://ntur.lib.ntu.edu.tw//handle/246246/2006111501211826A high-precision & low-cost micro-CMM (coordinate measuring machine) is under development. The expected measuring range is 25 × 25 × 10 mm3 & the resolution is 1 nm. In order to enhance the structural accuracy, some new ideas are integrated into the design, such as the arch-shape bridge for better stiffness & thermal accuracy, & the co-planar stage for less Abbe error. The linear diffraction grating interferometer & subdivision technique is proposed for position sensing to nanometre resolution. The focusing probe on the laser interferometer feedback spindle is structured in the Z-axis to guarantee the nanometre stability. In this report, the detailed design principles of the developed micro-CMM are described. The performance evaluation of each module of the prototype micro-CMM is presented. The positioning resolution of each axis to 1 nm can be achieved by combining the coarse & fine motion control on a piezo-ceramic linear motor. The Z-axis measurement can be controlled to within 15 nm repeatability. Parts of the positioning repeatability of the co-planar stage have been achieved to 30 nm. Some problems due to current techniques will be addressed.application/pdf1947238 bytesapplication/pdfzh-TWMicro-CMMnanometre accuracyarch bridgeco-planar stagefocusing probejournal articlehttp://ntur.lib.ntu.edu.tw/bitstream/246246/2006111501211826/1/1441.pdf