Effect of ambient air flow on resistivity uniformity of transparent Ga-doped ZnO film deposited by atmospheric pressure plasma jet

Juang, J.-Y.J.-Y.JuangHSIN-TIEN LINLiang, C.-T.C.-T.LiangLi, P.-R.P.-R.LiChen, W.-K.W.-K.ChenChen, Y.-Y.Y.-Y.ChenKUO-LONG PAN2020-01-132020-01-132018https://scholars.lib.ntu.edu.tw/handle/123456789/447788Effect of ambient air flow on resistivity uniformity of transparent Ga-doped ZnO film deposited by atmospheric pressure plasma jetjournal article10.1016/j.jallcom.2018.07.0302-s2.0-85049538323https://www.scopus.com/inward/record.uri?eid=2-s2.0-85049538323&doi=10.1016%2fj.jallcom.2018.07.030&partnerID=40&md5=2ffe0489718b81493f1ceb702e29c684