Multi-function optical characterization and inspection of MEMS components using stroboscopic coherence scanning interferometry

Tapilouw, A.M.A.M.TapilouwChen, L.-C.L.-C.ChenXuan-Loc, N.N.Xuan-LocChen, J.-L.J.-L.ChenLIANG-CHIA CHEN2020-01-132020-01-132014https://scholars.lib.ntu.edu.tw/handle/123456789/447840Multi-function optical characterization and inspection of MEMS components using stroboscopic coherence scanning interferometryjournal article10.1515/aot-2014-00312-s2.0-84941885536https://www.scopus.com/inward/record.uri?eid=2-s2.0-84941885536&doi=10.1515%2faot-2014-0031&partnerID=40&md5=87a8931267bc8432ea181e1669bdb5e3