Optimum sampling for track PEB CD integrated metrology

Chen, A.A.ChenHsueh, S.S.HsuehARGON CHENJAKEY BLUE2020-03-022020-03-022009https://scholars.lib.ntu.edu.tw/handle/123456789/467245Optimum sampling for track PEB CD integrated metrologyconference paper10.1109/COASE.2009.52340832-s2.0-70449103241https://www.scopus.com/inward/record.uri?eid=2-s2.0-70449103241&doi=10.1109%2fCOASE.2009.5234083&partnerID=40&md5=bed1f9a8d8e02a533cce729260f3b9a0