Development of dynamic 3-D surface profilometry using stroboscopic interferometric measurement and vertical scanning techniques

Fan, K.-C.K.-C.FanLIANG-CHIA CHENLin, C.-D.C.-D.LinChang, C.C.C.C.ChangKuo, C.-F.C.-F.KuoChou, Jung-TsungJung-TsungChou2020-01-132020-01-132005https://scholars.lib.ntu.edu.tw/handle/123456789/447907Development of dynamic 3-D surface profilometry using stroboscopic interferometric measurement and vertical scanning techniquesconference proceedings10.1088/1742-6596/13/1/0122-s2.0-24644495323https://www.scopus.com/inward/record.uri?eid=2-s2.0-24644495323&doi=10.1088%2f1742-6596%2f13%2f1%2f012&partnerID=40&md5=5d3a9f7fdd0490c9f42f01932528bfa7