Design and simulation of a CMOS-MEMS gyroscope with a low-noise sensing circuit

Hung, Hung-YaoHung-YaoHungWEN-PIN SHIHChang, Dou-RuDou-RuChangShih, Wen-PinWen-PinShih2018-09-102018-09-102010http://www.scopus.com/inward/record.url?eid=2-s2.0-77956120551&partnerID=MN8TOARShttp://scholars.lib.ntu.edu.tw/handle/123456789/356908174260 bytesapplication/pdfDesign and simulation of a CMOS-MEMS gyroscope with a low-noise sensing circuitconference paper10.1109/3CA.2010.5533538