Ultrasonic vibration assisted mechanical chemical polishing (MCP) of silicon carbide

Liao, Y.S.Y.S.LiaoYu, Y.P.Y.P.YuHuang, C.W.C.W.HuangYUNN-SHIUAN LIAO2020-01-132020-01-132012https://scholars.lib.ntu.edu.tw/handle/123456789/448640Ultrasonic vibration assisted mechanical chemical polishing (MCP) of silicon carbideconference paper10.4028/www.scientific.net/AMR.565.2552-s2.0-84869388765https://www.scopus.com/inward/record.uri?eid=2-s2.0-84869388765&doi=10.4028%2fwww.scientific.net%2fAMR.565.255&partnerID=40&md5=2a957a4ec6b70675ddaf9076db10275f