Guo, Ruey-ShanRuey-ShanGuoSlama, MikeMikeSlamaGriffin, RalphRalphGriffinHolman, KenKenHolman2019-05-132019-05-131993https://www.scopus.com/inward/record.uri?eid=2-s2.0-0027887148&partnerID=40&md5=ddec574748f737562603bcb206f6b418https://scholars.lib.ntu.edu.tw/handle/123456789/407848Work cell manufacturing system for VLSI fabricationconference paper2-s2.0-0027887148