Fabrication of silicon-core waveguide on bulk Si substrate with mold-assisted method and KrF excimer laser reformation

Chen, S.S.ChenHung, S.-C.S.-C.HungLin, S.-J.S.-J.LinShueh, H.-Y.H.-Y.ShuehYang, S.-T.S.-T.YangChang, S.-K.S.-K.ChangLin, Y.-Z.Y.-Z.LinChen, K.-Y.K.-Y.ChenCHING-FUH LIN2018-09-102018-09-102014http://www.scopus.com/inward/record.url?eid=2-s2.0-84919497245&partnerID=MN8TOARShttp://scholars.lib.ntu.edu.tw/handle/123456789/387123Fabrication of silicon-core waveguide on bulk Si substrate with mold-assisted method and KrF excimer laser reformationconference paper10.1109/NANO.2014.6968031