Wafer map failure pattern recognition and similarity ranking for large-scale data sets

Wu, M.-J.M.-J.WuJang, J.-S.R.J.-S.R.JangChen, J.-L.J.-L.ChenJYH-SHING JANG2018-09-102018-09-102015http://www.scopus.com/inward/record.url?eid=2-s2.0-84922505720&partnerID=MN8TOARShttp://scholars.lib.ntu.edu.tw/handle/123456789/392012[SDGs]SDG9Wafer map failure pattern recognition and similarity ranking for large-scale data setsjournal article10.1109/TSM.2014.2364237