High Dopant Activation of Phosphorus in Strained and Relaxed GeSn by Rapid Thermal Annealing and Microwave Annealing

Liu, J.-Y.J.-Y.LiuChiu, P.-Y.P.-Y.ChiuChuang, Y.Y.ChuangLiu, C.-Y.C.-Y.LiuLuo, G.-L.G.-L.LuoJIUN-YUN LI2020-06-112020-06-112019https://scholars.lib.ntu.edu.tw/handle/123456789/498461High Dopant Activation of Phosphorus in Strained and Relaxed GeSn by Rapid Thermal Annealing and Microwave Annealingconference paper10.1109/EDTM.2019.87310312-s2.0-85067794061https://www.scopus.com/inward/record.uri?eid=2-s2.0-85067794061&doi=10.1109%2fEDTM.2019.8731031&partnerID=40&md5=4384c2615a962c95743dc279d373efa0