Non-planar substrate metal-oxide-semiconductor photo-capacitance detectors with enhanced deep depletion sensitivity at convex corner

Tseng, P.-H.P.-H.TsengHwu, J.-G.J.-G.HwuJENN-GWO HWU2018-09-102018-09-102014http://www.scopus.com/inward/record.url?eid=2-s2.0-84904745297&partnerID=MN8TOARShttp://scholars.lib.ntu.edu.tw/handle/123456789/385261Non-planar substrate metal-oxide-semiconductor photo-capacitance detectors with enhanced deep depletion sensitivity at convex cornerjournal article10.1149/2.001406jss