Modeling and emulation of a furnace in IC fab based on colored-timed petri net

Lin, S.-Y.S.-Y.LinHuang, H.-P.H.-P.HuangHAN-PANG HUANG2020-01-132020-01-131998https://scholars.lib.ntu.edu.tw/handle/123456789/447412Modeling and emulation of a furnace in IC fab based on colored-timed petri netjournal article10.1109/66.7053762-s2.0-0032138478https://www.scopus.com/inward/record.uri?eid=2-s2.0-0032138478&doi=10.1109%2f66.705376&partnerID=40&md5=283502ab96645198427a903bae1d2107