Spring constant calibration of microcantilever by astigmatic detection system

Liao, H.-S.H.-S.LiaoJuang, B.-J.B.-J.JuangHuang, K.-Y.K.-Y.HuangHwu, E.-T.E.-T.HwuHSIEN-SHUN LIAOKUANG-YUH HUANG2020-01-132020-01-132012https://scholars.lib.ntu.edu.tw/handle/123456789/447522Spring constant calibration of microcantilever by astigmatic detection systemjournal article10.1143/JJAP.51.08KB132-s2.0-84865241468https://www.scopus.com/inward/record.uri?eid=2-s2.0-84865241468&doi=10.1143%2fJJAP.51.08KB13&partnerID=40&md5=e514b81cb2fd035c5ed1c5cd3c88b54a