CMOS compatible polysilicon nanowire FET for biomolecular sensing

Lin, C.-T.C.-T.LinWangJ.-C., Huang, C.-W.Huang, C.-W.J.-C.Hsueh, H.-T.H.-T.HsuehChang, Y.-J.Y.-J.Chang2013-01-292018-07-102013-01-292018-07-102011http://ntur.lib.ntu.edu.tw//handle/246246/246107en-USCMOS compatible polysilicon nanowire FET for biomolecular sensingconference paper