Formation of Crystalline Si Optical Waveguides on Bulk (100) Si Substrate as a New Platform for On-Chip Interconnect Applications

Shih-Che HungShih-Jieh LinJiun-Jie ChaoChia-Yu ChangMeng-Jie LinChing-Fuh LinCHING-FUH LIN2019-10-312019-10-3120167338724https://scholars.lib.ntu.edu.tw/handle/123456789/428877[SDGs]SDG9Formation of Crystalline Si Optical Waveguides on Bulk (100) Si Substrate as a New Platform for On-Chip Interconnect Applicationsjournal article10.1109/jlt.2016.26463812-s2.0-85018161586