Schipf, D.R.D.R.SchipfChen, C.-T.C.-T.ChenKuo, C.-L.C.-L.KuoChu, K.-Y.K.-Y.ChuWu, W.-J.W.-J.WuWang, W.-C.W.-C.WangWEN-JONG WU2020-01-172020-01-172015https://scholars.lib.ntu.edu.tw/handle/123456789/451976Aerosol deposited PZT actuated 2D scanner systemconference paper10.1117/12.21863332-s2.0-84948844015https://www.scopus.com/inward/record.uri?eid=2-s2.0-84948844015&doi=10.1117%2f12.2186333&partnerID=40&md5=259e8ec413e2638300892d53e36db074