Precision robust control for a three dimensional PZT stage

JIA-YUSH YEN2018-09-102018-09-102013http://www.scopus.com/inward/record.url?eid=2-s2.0-84888601766&partnerID=MN8TOARShttp://scholars.lib.ntu.edu.tw/handle/123456789/377699Precision robust control for a three dimensional PZT stageconference paper2-s2.0-84888601766