Luo, J.-T.J.-T.LuoWu, W.-F.W.-F.WuWen, H.-C.H.-C.WenWan, B.-Z.B.-Z.WanChang, Y.-M.Y.-M.ChangChou, C.-P.C.-P.ChouChen, J.-M.J.-M.ChenChen, W.-N.W.-N.Chen2019-05-092019-05-092007https://scholars.lib.ntu.edu.tw/handle/123456789/407012[SDGs]SDG6The roles of hydrophobic group on the surface of ultra low dielectric constant porous silica film during thermal treatmentjournal article10.1016/j.tsf.2007.03.0282-s2.0-34249106714WOS:000247897900038