High-speed atomic force microscope based on an astigmatic detection system

Liao, H.-S.H.-S.LiaoChen, Y.-H.Y.-H.ChenDing, R.-F.R.-F.DingHuang, H.-F.H.-F.HuangWang, W.-M.W.-M.WangHwu, E.-T.E.-T.HwuHuang, K.-Y.K.-Y.HuangChang, C.-S.C.-S.ChangHSIEN-SHUN LIAOKUANG-YUH HUANG2020-01-132020-01-132014https://scholars.lib.ntu.edu.tw/handle/123456789/447514High-speed atomic force microscope based on an astigmatic detection systemjournal article10.1063/1.48980192-s2.0-84908403717https://www.scopus.com/inward/record.uri?eid=2-s2.0-84908403717&doi=10.1063%2f1.4898019&partnerID=40&md5=b169d4d05772332684dd85303a8391a5