Kuen-Yu Tsai*Min-Jang ChenSamuel C. Pan (National Taiwan University/Taiwan Semiconductor Manufacturing Company)KUEN-YU TSAI2019-10-312019-10-312016https://scholars.lib.ntu.edu.tw/handle/123456789/429883Process for Fabricating Integrated Circuit (積體電路的製程)patentROC (Taiwan) I541860