Performance enhancement of metal-oxide-semiconductor tunneling temperature sensors with nanoscale oxides by employing ultrathin Al2O3 high-k dielectrics

Lin, C.-C.C.-C.LinHwu, J.-G.J.-G.HwuJENN-GWO HWU2018-09-102018-09-102013http://www.scopus.com/inward/record.url?eid=2-s2.0-84881484734&partnerID=MN8TOARShttp://scholars.lib.ntu.edu.tw/handle/123456789/378070Performance enhancement of metal-oxide-semiconductor tunneling temperature sensors with nanoscale oxides by employing ultrathin Al2O3 high-k dielectricsjournal article10.1039/c3nr02360e