2015-01-012024-05-15https://scholars.lib.ntu.edu.tw/handle/123456789/664678摘要：本研究將開發可撓式薄膜電子感測皮膚，應用作為行動生理訊號監測之用途。所製作的薄膜電子皮膚，須能夠耐久且長時間貼附於人體皮膚表面上，進行各式生理訊號量測，並可透過藍芽無線傳輸至智慧型手機或個人電腦上作監控訊號及分析。此元件利用無線電源感應線圈及氧化鋅擷能元件作為系統之電源供應，並透過薄膜鋰離子電池與碳基超級電容作為能量儲存。感測功能的部分，包含腦電波/心(跳)電波訊號感測器、體溫及應變感測器等，將製作於生物相容性材料聚對二甲苯(parylene)高分子薄膜上。而所必須要的電源處理與感測訊號擷取、放大電路及無線藍芽通訊晶片等，將會設計製作於軟性印刷電路板上。此系統整合多項技術，包含微機電薄膜蒸鍍與蝕刻技術、撓性電子電路技術、無線傳輸技術、壓電材料擷能技術、無線電源供應技術、多種電路及訊號擷取處理技術，並使用的數種先進材料製程，例如結晶法生成氧化鋅奈米線、製作奈米碳管分散液、氣體-液體-固體(VLS)成長法生成矽奈米線與化學氣相沉積parylene薄膜等。除應用於基本的生理訊號監測之外，期望能夠進一步將腦電訊號，作為輔助控制機械手(人)等其他應用。(Words count: 458)<br> Abstract: In this work, we will develop a flexible thin-film electronic skin with sensing and wireless technologies for mobile physiological monitoring application. The proposed hardware component consists four parts: power sources, power storage elements, sensors, and circuitry. The densely packed ZnO nano-wires, which will be grown by using a wet chemical method, will be used as the energy harvester. The proposed harvester is a sandwiched structure made of three layers. Vertical ZnO nanowires are sandwiched between the top and bottom layers. The power storage is a thin film supercapacitor, which consists of a pair of the MnO2-MWCNT buckypaper composite electrodes and the gel polymer electrolyte. The composite electrodes are prepared by galvano-static electrochemical depositing manganese oxide onto free standing nano-porous multi-walled CNT sheet (buckypaper). The buckypaper will be fabricated by using a vacuum filtration method. Physiological sensing capabilities, such as electrocardiography (ECG) sensing and electroencephalography (EEG) sensing, will be implemented. Theses sensors are fabricated and integrated on biocompatible polymer substrate made of parylene-C. In addition, resistance-based temperature sensors using gold/platinum layers will be realized. Tactile and strain sensing using polymer-based carbon-nanotube sensing elements will also be implemented. Health signal monitoring (ex. body temperature, heartbeat) will be provided for disease patients or users. EEG or EMG signals could be used for further applications. Also, a circuit with capabilities of signal acquisition, amplification, energy circuit, and wireless communication will be developed on flexible printed circuit board (FPCB). The physiological signals are transmitted to the smart phone or PC by Bluetooth for analysis and monitoring.撓性電子生理感測器超級電容氧化鋅擷能元件無線供電與傳輸electronic skinphysiological sensingsuper capacitorenergy harvesterwireless communication