Control and improvement of crystalline cracking from GaN thin films grown on Si by metalorganic chemical vapor deposition

Yu, J.W.J.W.YuLin, H.C.H.C.LinFeng, Z.C.Z.C.FengWang, L.S.L.S.WangTripathy, S.S.TripathyChua, S.J.S.J.Chua2009-03-112018-07-062009-03-112018-07-062006http://ntur.lib.ntu.edu.tw//handle/246246/144195application/pdf619990 bytesapplication/pdfen-USControl and improvement of crystalline cracking from GaN thin films grown on Si by metalorganic chemical vapor depositionjournal articlehttp://ntur.lib.ntu.edu.tw/bitstream/246246/144195/1/17.pdf