2015-06-012024-05-17https://scholars.lib.ntu.edu.tw/handle/123456789/687861摘要：全球半導體業、電子產業已進入成熟期，技術競爭更顯激烈。半導體廠中製程所使用的所有流體都必須滿足超潔淨的須求，且隨著精密度與安全度要求之提高，不純物的容忍度就越低，而流體純度隨著製程的微小化，逐漸成為研發新式半導體製程尺寸中關鍵的一環。本計劃將因應此需求，開發半導體製程液分離與純化之無機膜分離程序，從奈米材料開發著手到自動反覆逆洗式無機膜過濾系統的設計開發，期能協助我國電子產業能建立連續式製程液過濾與純化的自動化系統。<br> Abstract: Recent advances in the electronic industry has created more stringent requirements of fine separation processes to obtain ultrapure process liquids. As these requirements continue to increase, assuring the purity of process liquids used in the advanced technology processes has become far more critical. In these advanced technology processes, liquid clarification technology is used to separate and remove solute constituents such as ultrafine particle, nanoparticle, microorganisms, and suspended matter such as emulsions as well as inorganic ions, soluble organic from water, oil, solvent, melt polymer etc. However, owing to the lake of fundamental understanding of the liquid clarification for such a nanolevel materials, an economical way to obtain particleless liquids is still deficiency. In order to meet the demand to efficiently solve liquid clarification problems, we propose a two-year project to conduct the fundamental understanding of inorganic nanofiltration and its application on the processes of advanced technologies.