Yang, Y.-J.Y.-J.YangKuo, W.-C.W.-C.KuoLiao, B.-T.B.-T.Liao2010-10-192018-06-282010-10-192018-06-282007-01http://ntur.lib.ntu.edu.tw//handle/246246/217240en-USA novel 2x2 MEMS optical switch using the split-cross-bar designjournal article