Design and performance verification of a microscope-based interferometer for miniature-specimen metrology

Lee, C.-K.C.-K.LeeWu, W.-J.W.-J.WuWu, G.-Y.G.-Y.WuLi, C.-L.C.-L.LiChen, Z.-D.Z.-D.ChenWEN-JONG WUCHIH-KUNG LEE2020-01-172020-01-172005https://scholars.lib.ntu.edu.tw/handle/123456789/452055Design and performance verification of a microscope-based interferometer for miniature-specimen metrologyjournal article10.1117/1.20101472-s2.0-33644786784https://www.scopus.com/inward/record.uri?eid=2-s2.0-33644786784&doi=10.1117%2f1.2010147&partnerID=40&md5=27e866d49e2ffa745c0d1ce5d8200439