AOI Strategies for Defects Identification of Micro-Electro Mechanical System Elements

Young, H.T.H.T.YoungChiou, H.S.H.S.ChiouHuang, W.R.W.R.HuangHONG-TSU YOUNG2021-11-222021-11-222014https://scholars.lib.ntu.edu.tw/handle/123456789/587640Dubai, UAEAOI Strategies for Defects Identification of Micro-Electro Mechanical System Elementsconference paper