Vibration measurement and suppression for laser galvanometers using a micro-electromechanical system-based accelerometer

Chou, P.-H.P.-H.ChouHsu, Y.-L.Y.-L.HsuYang, S.-C.S.-C.YangChang, H.-C.H.-C.ChangKuo, Y.-C.Y.-C.KuoChiu, L.-F.L.-F.ChiuChen, Y.-T.Y.-T.ChenSHIH-CHIN YANG2020-01-132020-01-132018https://scholars.lib.ntu.edu.tw/handle/123456789/448259Vibration measurement and suppression for laser galvanometers using a micro-electromechanical system-based accelerometerjournal article10.18494/SAM.2018.19762-s2.0-85056198578https://www.scopus.com/inward/record.uri?eid=2-s2.0-85056198578&doi=10.18494%2fSAM.2018.1976&partnerID=40&md5=c8c676597659e83fe901a50aaad2fcba