Micromachining of mesoporous oxide films for microelectromechanical system structures

SHIH-KANG FAN2018-09-102018-09-102002http://www.scopus.com/inward/record.url?eid=2-s2.0-0036670397&partnerID=MN8TOARShttp://scholars.lib.ntu.edu.tw/handle/123456789/298571Micromachining of mesoporous oxide films for microelectromechanical system structuresjournal article