Chen, H.-L.H.-L.ChenChu, T.-C.T.-C.ChuHsu, C.-K.C.-K.HsuKo, F.-H.F.-H.KoHuang, T.-Y.T.-Y.HuangHSUEN-LI CHEN2020-05-122020-05-122002https://scholars.lib.ntu.edu.tw/handle/123456789/491381Fabry-Perot-type antireflective coating for deep-ultraviolet binary photomask applicationsjournal article10.1364/AO.41.0039612-s2.0-0036642131https://www.scopus.com/inward/record.uri?eid=2-s2.0-0036642131&doi=10.1364%2fAO.41.003961&partnerID=40&md5=cad24aaa8117a73ec9cc78c139aff642