Optical-gradient type of antireflective coatings for sub-70 nm optical lithography applications

Chen, H.L.H.L.ChenFan, W.W.FanWang, T.J.T.J.WangKo, F.H.F.H.KoZhai, R.S.R.S.ZhaiHsu, C.K.C.K.HsuChuang, T.J.T.J.ChuangHSUEN-LI CHEN2020-05-122020-05-122003https://scholars.lib.ntu.edu.tw/handle/123456789/491375Optical-gradient type of antireflective coatings for sub-70 nm optical lithography applicationsconference paper10.1109/CLEOPR.2003.12772412-s2.0-84955284772https://www.scopus.com/inward/record.uri?eid=2-s2.0-84955284772&doi=10.1109%2fCLEOPR.2003.1277241&partnerID=40&md5=c4e97fed3fe48b7385e4affc3f70379f