Single step sequential polydimethylsiloxane wet etching to fabricate a microfluidic channel with various cross-sectional geometries

Wang C.-K.Liao W.-H.Wu H.-M.Lo Y.-H.Lin T.-R.CHIEN-KAI WANGHSIAO-MEI WU2020-03-022020-03-02201709601317https://www.scopus.com/inward/record.uri?eid=2-s2.0-85032726754&doi=10.1088%2f1361-6439%2faa874d&partnerID=40&md5=c56b376eb2c12b3aa091c2a7a8166a53https://scholars.lib.ntu.edu.tw/handle/123456789/467116Single step sequential polydimethylsiloxane wet etching to fabricate a microfluidic channel with various cross-sectional geometriesjournal article10.1088/1361-6439/aa874d2-s2.0-85032726754