Optical Nano and Micro Actuator Technology, Chapter 16: Multiscale, Hierarchical Integration of Soft Polymer Micro- and Nano Structures into Optical MEMS

K. KurabayashiN. -T. HuangY.-C. TungNIEN-TSU HUANG2018-09-102018-09-102012-11http://scholars.lib.ntu.edu.tw/handle/123456789/374206Optical Nano and Micro Actuator Technology, Chapter 16: Multiscale, Hierarchical Integration of Soft Polymer Micro- and Nano Structures into Optical MEMSbook