Lee, Chi-YuanChi-YuanLeeChang, Pei-ZenPei-ZenChangChen, Yung-YuYung-YuChenDai, Ching-LiangChing-LiangDaiChen, Ping-HeiPing-HeiChenPING-HEI CHENPEI-ZEN CHANG2009-01-212018-06-292009-01-212018-06-292005http://ntur.lib.ntu.edu.tw//handle/246246/106993application/pdf151221 bytesapplication/pdfen-USNovel Method for in situ Monitoring of Thickness of Quartz during Wet Etching10.1143/JJAP.44.76622-s2.0-31544443552WOS:000232739300094http://ntur.lib.ntu.edu.tw/bitstream/246246/106993/1/15.pdf