InGaAs MOSCAPs and self-aligned inversion-channel MOSFETs with Al2O3/Ga2O3 (Gd2O3) as a gate dielectric

Lin, TDTDLinChiu, HCHCChiuChang, PPChangLee, WCWCLeeChiang, THTHChiangKwo, JRJRKwoTsai, WWTsaiMINGHWEI HONG2018-09-102018-09-102009http://scholars.lib.ntu.edu.tw/handle/123456789/349413InGaAs MOSCAPs and self-aligned inversion-channel MOSFETs with Al2O3/Ga2O3 (Gd2O3) as a gate dielectricjournal article