JUI-CHE TSAIWu, M.C.M.C.Wu2009-03-252018-07-062009-03-252018-07-06200510577157http://ntur.lib.ntu.edu.tw//handle/246246/147797https://www.scopus.com/inward/record.uri?eid=2-s2.0-29244487535&doi=10.1109%2fJMEMS.2005.859193&partnerID=40&md5=ef61c65f99283477162b2b5b4d850dd6In this paper, we report on a MEMS-based two-axis optical scanner array with a high fill factor (> 96%), large mechanical scan angles (±4.4° and ±3.4°), and high resonant frequencies (20.7 kHz). The devices are fabricated using SUMMiT-V, a five-layer surface-micromachining process. High fill factor, which is important for 1 × N2 wavelength-selective switches (WSSs), is achieved by employing crossbar torsion springs underneath the mirror, eliminating the need for gimbal structures. The proposed mirror structure can be readily extended to two-dimensional (2-D) array for adaptive optics applications. In addition to two-axis rotation, piston motion with a stroke of 0.8 μm is also achieved. © 2005 IEEE.application/pdf555678 bytesapplication/pdfen-USMicroelectromechanical devices; Micromirror array; Optical components; Optical fiber switches; Wavelength division multiplexing (WDM); Wavelength-selective switchesAdaptive optics; Micromachining; Microoptics; Mirrors; Optical communication; Optical design; Optical fiber fabrication; Optical switches; Scanning; Wavelength division multiplexing; Micromirror array; Optical components; Optical fiber switches; Optical scanner array; Surface-micromachining; Wavelength-selective switches; Microelectromechanical devicesjournal article10.1109/JMEMS.2005.8591932-s2.0-29244487535http://ntur.lib.ntu.edu.tw/bitstream/246246/147797/1/02.pdf